Readout of superresolution pits with Sb superresolution reflective films

Hao Ruan; Jingsong Wei

doi:10.1117/12.483344

17 September 2002 Readout of super-resolution pits with Sb super-resolution reflective films

Hao Ruan, Jingsong Wei

Proceedings Volume 4930, Advanced Optical Storage Technology; (2002) https://doi.org/10.1117/12.483344
Event: Photonics Asia, 2002, Shanghai, China

Abstract

By using Sb as the super-resolution reflective layer and the SiN as dielectric layer, the super-resolution pits with a diameter of 380 nm were read out by the readout optics system with a laser wavelength of 632.8 nm and a NA of 0.40. In addition, the influence of the Sb thin film thickness on the readout signal was investigated, the results showed that the optimum Sb thin film thickness is 28 to approximatley 30 nm, and the maximum CNR is 38 to approximately 40 dB.

Citation Download Citation

Hao Ruan and Jingsong Wei "Readout of super-resolution pits with Sb super-resolution reflective films", Proc. SPIE 4930, Advanced Optical Storage Technology, (17 September 2002); https://doi.org/10.1117/12.483344

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available