Paper
25 June 2003 High-Q silica microsphere optical resonator sensors using stripline-pedestal antiresonant reflecting optical waveguide couplers
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Abstract
There is currently a significant amount of interest in the development of integrated optical sensors for a variety of applications. Attractive features of these types of sensors include miniature size and low operating powers. We have demonstrated a novel integrated optical sensor platform based on high-Q silica microsphere resonators and stripline-pedestal anti-resonant reflecting optical waveguide (SPARROW) optical couplers. Advantages of the planar SPARROW coupler include high light coupling efficiency, robust planar structure, and standard optical chip processing/fabrication techniques. High light coupling efficiencies (approaching 100%) have been observed using this sensor platform. Several sensor configurations are presented here, including one designed to reduce input optical power requirements. High resolution flexured-mass-based sensors which have been demonstrated include acceleration and seismic sensors. Proposed sensor concepts based on thermo-optic effects are also discussed.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Charles Tapalian, Juha-Pekka Laine, and Paul A. Lane "High-Q silica microsphere optical resonator sensors using stripline-pedestal antiresonant reflecting optical waveguide couplers", Proc. SPIE 4969, Laser Resonators and Beam Control VI, (25 June 2003); https://doi.org/10.1117/12.499271
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CITATIONS
Cited by 9 patents.
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KEYWORDS
Sensors

Waveguides

Resonators

Silica

Integrated optics

Modulation

Thermal optics

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