Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity

Atsushi Yamada; Toru Tokita; Masashi Ohkawa; Seishi Sekine; Takashi Sato

doi:10.1117/12.474347

19 June 2003 Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity

Atsushi Yamada, Toru Tokita, Masashi Ohkawa, Seishi Sekine, Takashi Sato

Author Affiliations +

Proceedings Volume 4987, Integrated Optics: Devices, Materials, and Technologies VII; (2003) https://doi.org/10.1117/12.474347
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

In this paper, an original scale-reduction rule without sensitivity loss in integrated optic pressure sensors based on the elasto-optic effect is described. The sensor has a rectangular diaphragm as a pressure-sensitive mechanical structure and a sensing waveguide on the diaphragm. In this type of sensor, sensitivity is theoretically known to be strongly dependent on the dimensions of the diaphragm. According to the theoretical results, the sensitivity can be kept constant even if the diaphragm dimensions are reduced as long as both the side length ratio and the characteristic length remain constant. Here, the characteristic length is introduced as the sube of the shorter side length of the diaphragm divided by the square of the thickness. Such a scale-reduction rule would be very significant in the miniaturizing of a sensor without reducing sensitivity, but it has not been experimentally confirmed. In this study, the scale-reduction rule was experimentally examined using three fabricated sensors, which had the same side length ratio and the same characteristic length. The exact dimensions of the sensors were 2.0 mm x 10mmx35 μm, 2.5 mmx12.5 mmx49 μm and 3.0 mmx15 mmx64 μm. The measured sensitivities of the three sensors were quite similar to each other as theoretically predicted.

Citation Download Citation

Atsushi Yamada, Toru Tokita, Masashi Ohkawa, Seishi Sekine, and Takashi Sato "Scale-reduction rule for diaphragm dimensions to miniaturize a silicon-based integrated optic pressure sensor without reducing sensitivity", Proc. SPIE 4987, Integrated Optics: Devices, Materials, and Technologies VII, (19 June 2003); https://doi.org/10.1117/12.474347

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