Paper
22 July 2003 Multichannel and multiaxis inertial sensor concepts based on vibrating structures
Colin H.J. Fox, Anthony Rourke, Rebecka Eley, Christopher Fell, Stewart McWilliam
Author Affiliations +
Abstract
Single-axis rate sensors (rate gyroscopes) that utilize Coriolis coupling between a single pair of modes of a simple vibrating structure have been widely researched and are being used in increasing numbers in a range of aerospace, automotive and other applications. To meet market demands for such sensors, there are now significant pressures to reduce cost and size and to improve basic performance. Size and cost reduction will be achieved via MEMS technology, but size reduction and performance improvement are often conflicting requirements. This paper examines some smart alternatives to simple size reduction. The presented concepts allow more information to be measured by a single sensor structure by using more of the available spectrum of vibration modes available in the sensor structure. The concepts are illustrated in the form of a multi-channel rate sensor based on a vibrating cylinder and a multi-axis rate sensor based on a vibrating ring. Test results from prototype sensors are presented.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Colin H.J. Fox, Anthony Rourke, Rebecka Eley, Christopher Fell, and Stewart McWilliam "Multichannel and multiaxis inertial sensor concepts based on vibrating structures", Proc. SPIE 5050, Smart Structures and Materials 2003: Smart Sensor Technology and Measurement Systems, (22 July 2003); https://doi.org/10.1117/12.484231
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KEYWORDS
Sensors

Prototyping

Gyroscopes

Head

Microelectromechanical systems

Transducers

Electrodes

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