Large-scale microwave CVD system for synthesis of carbon nanotubes

Vijay K. Varadan; Jining Xie

doi:10.1117/12.497449

22 July 2003 Large-scale microwave CVD system for synthesis of carbon nanotubes

Vijay K. Varadan, Jining Xie

Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.497449
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

Carbon nanotubes (CNTs) are an interesting class of nanostructures which can be thought of as arising from the folding of a layer of graphite (a graphene sheet ) to form a hollow cylinder composed of carbon hexagons. However, practical applications are still limited by the intricate process of synthesis and the inability of present day methods for large scale production of carbon nanotubes. Morevoer high quality nanotubes with functionalization capability with polymers are desired for polymer MEMS, Nanodevices and BioMEMS. In this paper, an innovative CVD approach using microwave energy was developed for large scale production of single wall and multiwall carbon nanotubes (MWNTs). Straight and helical carbon nanotubes were obtained when acetylene decomposed over the cobalt catalyst at 700°C created by microwave field. The scanning electron microscopy (SEM) of microwave driven MWNTs revealed their homogenous nature. The high resolution electron microscopy (HRTEM) showed typical MWNT has 26 layers. The average diameter of the tubes was observed 20-30 nm. Electron microscope observations showed higher yield of nanotubes obtained from microwave CVD than thermal filament CVD method.

Citation Download Citation

Vijay K. Varadan and Jining Xie "Large-scale microwave CVD system for synthesis of carbon nanotubes", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.497449

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KEYWORDS

Microwave radiation

Chemical vapor deposition

Carbon nanotubes

Carbon

Scanning electron microscopy

Microelectromechanical systems

Transmission electron microscopy

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