Optimal instrument control strategy for an actuator system with 1-angstrom closed-loop positioning resolution

Yufeng Han; Thomas Wong; Deming Shu

doi:10.1117/12.506394

27 October 2003 Optimal instrument control strategy for an actuator system with 1-angstrom closed-loop positioning resolution

Yufeng Han, Thomas Wong, Deming Shu

Author Affiliations +

Proceedings Volume 5176, Optomechanics 2003; (2003) https://doi.org/10.1117/12.506394
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

An optimal instrument control strategy for a dual-stage actuator system is presented. Resolution extension by signal conditioning and digital averaging techniques was implemented during the instrument design. The motion controller was developed based on robust PID (proportional-integral-derivative) algorithm and coarse/fine relay mechanism. The closed-loop residual noise and optimal dynamic performance are demonstrated by experiments.

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Yufeng Han, Thomas Wong, and Deming Shu "Optimal instrument control strategy for an actuator system with 1-angstrom closed-loop positioning resolution", Proc. SPIE 5176, Optomechanics 2003, (27 October 2003); https://doi.org/10.1117/12.506394

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