Paper
12 December 2003 Lightweight mirrors from single-crystal silicon
Vincent T. Bly, David A. Content, John G. Hagopian, Linette D. Kolos, David O. Moore
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Abstract
A process for fabricating high quality light weight mirrors from single crystal silicon is described. The process uses conventional fabrication techniques in an unconventional sequence. It is capable of producing mirrors with 1/4th the mass of an equivalent solid quartz mirror. Each mirror is a monolithic structure of single crystal silicon. Mirrors with optical figures better than 1/10th wave peak-to-valley (@633 nm) have been demonstrated.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vincent T. Bly, David A. Content, John G. Hagopian, Linette D. Kolos, and David O. Moore "Lightweight mirrors from single-crystal silicon", Proc. SPIE 5179, Optical Materials and Structures Technologies, (12 December 2003); https://doi.org/10.1117/12.511569
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Cited by 1 scholarly publication.
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KEYWORDS
Mirrors

Silicon

Surface finishing

Lightweight mirrors

Polishing

Silicon carbide

Crystals

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