Sensing arrays based on integrated optics microresonators for homeland security applications

Dion Klunder; Job Elders; Gert-Jan Burger; Martin Amersfoort; Evgueni Krioukov; Cees Otto; Hugo Hoekstra; Alfred Driessen

doi:10.1117/12.515862

8 March 2004 Sensing arrays based on integrated optics microresonators for homeland security applications

Dion Klunder, Job Elders, Gert-Jan Burger, Martin Amersfoort, Evgueni Krioukov, Cees Otto, Hugo Hoekstra, Alfred Driessen

Author Affiliations +

Proceedings Volume 5269, Chemical and Biological Point Sensors for Homeland Defense; (2004) https://doi.org/10.1117/12.515862
Event: Optical Technologies for Industrial, Environmental, and Biological Sensing, 2003, Providence, RI, United States

Abstract

Integrated optics micoresonators (μ-resonators) are microstructures with dimensions typically in the order of tens of microns down to a few microns, whose response depends critically on optical wavelength and material properties. Recent experimental studies have shown that they are suitable as refractive index sensors, absorption sensors, and microresonator-assisted single and two-photon fluorescence. The absorption and fluorescence spectra are material-specific properties, that the devices can readily detect by using different excitation wavelengths. Therefore, the devices are suitable for non-specific agent detection. Due to their inherent small size and the ease of cascading several microresonators, they are suitable building blocks for a sensing array allowing sensing/detection of multiple quantities/agents on a single chip, by e.g., using different chemo-optical transduction layers on top of the microresonators. Such devices have a chip-area of only a few 100 μm², making them suitable for sensing ultra-small analyte volumes (which is advantageous for bio-chemical sensing). In this contribution, sensing arrays based on integrated optics microresonators and their prospects for Homeland Security applications are discussed. Several device-concepts based on integrated optics microresonators will be treated. Their performance is analyzed using realistic parameters and experimental results of microresonator devices realized in silicon oxynitride (SiON) technology. The potential integration of theses devices with microelectronics, micro-mechanics and micro total analysis systems is discussed.

Citation Download Citation

Dion Klunder, Job Elders, Gert-Jan Burger, Martin Amersfoort, Evgueni Krioukov, Cees Otto, Hugo Hoekstra, and Alfred Driessen "Sensing arrays based on integrated optics microresonators for homeland security applications", Proc. SPIE 5269, Chemical and Biological Point Sensors for Homeland Defense, (8 March 2004); https://doi.org/10.1117/12.515862

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