Sol-gel processed MoO3 and WO3 thin films for use as selective chemo-sensors

Perena Gouma; Elisabetta Comini; Giorgio Sberveglieri

doi:10.1117/12.532371

29 March 2004 Sol-gel processed MoO₃ and WO₃ thin films for use as selective chemosensors

Perena Gouma, Elisabetta Comini, Giorgio Sberveglieri

Proceedings Volume 5275, BioMEMS and Nanotechnology; (2004) https://doi.org/10.1117/12.532371
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

Selective detection of small amounts of toxic gases, such as ammonia and CO is very important to environmental monitoring as well as for medical diagnoses. MoO₃ and WO₃ have been identified as suitable materials for detecting these gases with high sensitivity. Sol-gel processed thin films of MoO₃, WO₃ and their combination have been prepared at SUNY Stony Brook by the hydrolysis of metal alkoxide precursors followed by spin coating and were deposited on alumina heater/electrode containing substrates that were produced by the Brescia group. Sensing tests were carried out in the state-of-the-art gas sensor testing facilities available in Brescia, where the electrical resistance of sensor arrays was recorded as a function of gas concentration, for various combinations of gases (including ammonia, CO, NO₂, Methanol, isoprene, etc) at 10% relative humidity and at temperatures ranging from 400-500°C. The MoO₃-WO₃ composite system showed the best stability at the highest testing temperature. The sensing results obtained are correlated with the structural characteristics of the sensing films. This work has been carried out as a joint collaboration between the Advanced Materials Characterization Laboratory of SUNY Stony Brook (USA) and the Sensor Lab at the University of Brescia (Italy) and was funded by a NSF-AAAS (WISC) grant awarded to Perena Gouma.

Citation Download Citation

Perena Gouma, Elisabetta Comini, and Giorgio Sberveglieri "Sol-gel processed MoO₃ and WO₃ thin films for use as selective chemosensors", Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); https://doi.org/10.1117/12.532371

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