Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles

Y. L. Song; S. C. Tsai; W. J. Chen; Y. F. Chou; T. K. Tseng; C. S. Tsai

doi:10.1117/12.527862

24 January 2004 Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles

Y. L. Song, S. C. Tsai, W. J. Chen, Y. F. Chou, T. K. Tseng, C. S. Tsai

Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.527862
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

This paper compares the simulation results with the experimental results of impedance analysis and longitudinal vibration measurement of micro-fabricated 0.5 MHz silicon-based ultrasonic nozzles. Impedance analysis serves as a good diagnostic tool for evaluation of longitudinal vibration of the nozzles. Each nozzle is made of a piezoelectric drive section and a silicon-resonator consisting of multiple Fourier horns each with half wavelength design and twice amplitude magnification. The experimental results verified the simulation prediction of one pure longitudinal vibration mode at the resonant frequency in excellent agreement with the design value. Furthermore, at the resonant frequency, the measured longitudinal vibration amplitude gain at the nozzle tip increases as the number of Fourier horns (n) increases in good agreement with the theoretical value of 2ⁿ. Using this design, very high vibration amplitude at the nozzle tip can be achieved with no reduction in the tip cross sectional area. Therefore, the required electric drive power should be drastically reduced, decreasing the likelihood of transducer failure in ultrasonic atomization.

Citation Download Citation

Y. L. Song, S. C. Tsai, W. J. Chen, Y. F. Chou, T. K. Tseng, and C. S. Tsai "Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); https://doi.org/10.1117/12.527862

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