Specification of the phase angle of a 6% attenuated PSM mask used in ArF lithography

Ching-Hsu Chang; Jochen Schacht; Benjamin Szu-Min Lin; Kuei-Chun Hung; I. Hsuing Huang

doi:10.1117/12.535167

28 May 2004 Specification of the phase angle of a 6% attenuated PSM mask used in ArF lithography

Ching-Hsu Chang, Jochen Schacht, Benjamin Szu-Min Lin, Kuei-Chun Hung, I. Hsuing Huang

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.535167
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

As 6% attenuated phase shift masks (PSM) become commonly used in ArF advanced lithography for the 90nm Technology and mass production to print lines/ spaces as well as contacts, the specification and control of the phase angle and the width of the distribution of phase angles becomes critical to maintain the quality of the lithography process. The influence of the mean phase angle and the width of the distribution of phase angles on the best focus, the through pitch behavior and uniformity of the critical dimension (CD uniformity) has been studied experimentally using a 6% attenuated PSM whose phase angle has been affected by several reticle cleans. The results are consistent with aerial image simulations. Independent specifications for the mean phase angle and the width of the distribution of phase angles have been derived and could be applied for the production of masks in the future.

Citation Download Citation

Ching-Hsu Chang, Jochen Schacht, Benjamin Szu-Min Lin, Kuei-Chun Hung, and I. Hsuing Huang "Specification of the phase angle of a 6% attenuated PSM mask used in ArF lithography", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.535167

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