Electron-beam-induced deposition of iron carbon nanostructures from iron dodecacarbonyl vapor

M. A. Bruk; E. N. Zhikharev; E. I. Grigoriev; A. V. Spirin; V. A. Kalnov; I. E. Kardash

doi:10.1117/12.558349

28 May 2004 Electron-beam-induced deposition of iron carbon nanostructures from iron dodecacarbonyl vapor

M. A. Bruk, E. N. Zhikharev, E. I. Grigoriev, A. V. Spirin, V. A. Kalnov, I. E. Kardash

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.558349
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

Iron based nanocomposites are of great interest in particular because of their magnetic properties. Preliminary results on image deposition from iron dodecacarbonyl by focused electron beam are presented. The specific electric resistance of fabricated lines was measured in the range from 4•10^-2to 10³ Ω cm dependently on deposition conditions. It was observed, that if the beam current increases, specific resistance sharply decreases. Positive temperature coefficient of conductivity for such material was determined. Effective activation energy of conductivity changed from 3-5kJ/mol for high conductivity lines to 15-25kJ/mol for low conductivity lines. Obtained data are considered on the base of representations of produced lines material as nanoclusters of iron spread in amorphous carbon matrix. The resistance change of deposited lines in media of different vapours and gases was estimated.

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M. A. Bruk, E. N. Zhikharev, E. I. Grigoriev, A. V. Spirin, V. A. Kalnov, and I. E. Kardash "Electron-beam-induced deposition of iron carbon nanostructures from iron dodecacarbonyl vapor", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.558349

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