Tomographic reconstruction of space plasma inhomogeneities in wide-aperture plasma sources under strong restriction on the points of view

Konstantin V. Rudenko; A. V. Fadeev; Alexander A. Orlikovsky; K. A. Valiev

doi:10.1117/12.557252

28 May 2004 Tomographic reconstruction of space plasma inhomogeneities in wide-aperture plasma sources under strong restriction on the points of view

Konstantin V. Rudenko, A. V. Fadeev, Alexander A. Orlikovsky, K. A. Valiev

Author Affiliations +

Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.557252
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation

Abstract

Lateral distribution of particles density in the plasma across the wafer surface is critical for plasma processing steps in IC manufacturing and should be optimized at the stage of process design. Optical emission tomography of the plasma is promising technique for this goal. Presented investigation is carried out to develop the algorithms of tomographic reconstruction of 2D-distribution plasma species density from its characteristic optical emission data. The geometry of the tomographic data acquisition was chosen to be compatible with the commercial types of plasma reactors. Advanced accuracy of reconstruction has been achieved by including the classes of the space profiles of inhomogeneities based on the discharge physics into reconstruction algorithm. The tests have been performed with the kinds of inhomogeneities, which is most probable in plasma reactors with HDP sources.

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Konstantin V. Rudenko, A. V. Fadeev, Alexander A. Orlikovsky, and K. A. Valiev "Tomographic reconstruction of space plasma inhomogeneities in wide-aperture plasma sources under strong restriction on the points of view", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.557252

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