Fabrication of photonic integrated circuits by DUV-induced modification of polymers

Patric Henzi; Dominik Gerhard Rabus; Ulrike Wallrabe; Juergen Mohr

doi:10.1117/12.544481

18 August 2004 Fabrication of photonic integrated circuits by DUV-induced modification of polymers

Patric Henzi, Dominik Gerhard Rabus, Ulrike Wallrabe, Juergen Mohr

Proceedings Volume 5451, Integrated Optics and Photonic Integrated Circuits; (2004) https://doi.org/10.1117/12.544481
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

The expansion of high capacity optical transmission techniques into price-sensitive areas such as datacom and access networks requires a major reduction in the cost of optical components. Polymer waveguides are attractive because they are very simple to process and are promising for low-cost devices. Deep UV-induced modification of the dielectric properties of polymers is a useful technique for low cost realization of integrated optical circuits for telecommunication und sensor applications. The technique presented here has several advantages with respect to common methods because only a single polymer layer is used, which serves as the substrate and waveguide as well and no further etching or development step is required. The integration of the waveguide circuits in a polymer microoptical bench offers the possibility of combining the devices with semiconductor based optical circuits and also achieve easy fiber-chip coupling. In this work, preliminary results of Y-junctions, directional couplers, multimode interference (MMI) couplers will be given.

Citation Download Citation

Patric Henzi, Dominik Gerhard Rabus, Ulrike Wallrabe, and Juergen Mohr "Fabrication of photonic integrated circuits by DUV-induced modification of polymers", Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); https://doi.org/10.1117/12.544481

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available