New principles of diagnostics of surface parameters of solids by methods of x-ray total external reflection

S. V. Balovsyak; Igor M. Fodchuk

doi:10.1117/12.559861

4 June 2004 New principles of diagnostics of surface parameters of solids by methods of x-ray total external reflection

S. V. Balovsyak, Igor M. Fodchuk

Proceedings Volume 5477, Sixth International Conference on Correlation Optics; (2004) https://doi.org/10.1117/12.559861
Event: Sixth International Conference on Correlation Optics, 2003, Chernivsti, Ukraine

Abstract

The series of GaAs and SiO₂ samples with the specially prepared one- and two-dimensional surface reliefs have been investigated by the methods of integral and differential curve of X-ray total external reflection. The direct and inverse problems were solved, taking into consideration data obtained by the method of atomic-force microscopy. The theoretical curves of total external reflection are calculated and the parameters describing a surface relief of the samples are restored. The fractal approach for describing of the shape of differential curves and surface profiles was used.

Citation Download Citation

S. V. Balovsyak and Igor M. Fodchuk "New principles of diagnostics of surface parameters of solids by methods of x-ray total external reflection", Proc. SPIE 5477, Sixth International Conference on Correlation Optics, (4 June 2004); https://doi.org/10.1117/12.559861

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