The application of Bessel function methods on high-frequency vibration calibration

Jingfeng Xue; Tianxiang He

doi:10.1117/12.579603

22 June 2004 The application of Bessel function methods on high-frequency vibration calibration

Jingfeng Xue, Tianxiang He

Proceedings Volume 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2004) https://doi.org/10.1117/12.579603
Event: Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2004, Ancona, Italy

Abstract

Bessel function methods are used on high-frequency vibration calibration. In this paper, a general principle, devices, methods and uncertainty evaluations will be introduced. There are four methods based on Bessel function, which include J₀ minimum-point method, J₁ minimum-point method, J₁ ratio method and J₁/J₂ ratio method. About this calibration system, the frequency range is 2 ~ 50) kHz and the displacement range is (0.002~0.2) μm. At the same time, two important things will be described, one is a frequency-adjustable piezoelectricity vibrator which is good for high-frequency vibration calibration on account of almost no equilibrium excursion, and the other is double-holes method used in evaluating the linearity of laser interferometer which is important for calibration.

Citation Download Citation

Jingfeng Xue and Tianxiang He "The application of Bessel function methods on high-frequency vibration calibration", Proc. SPIE 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 June 2004); https://doi.org/10.1117/12.579603

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