Paper
20 December 2004 Spot size mode converter for efficient coupling to SiN waveguides
My T. Doan, Chi Fo Tsang, Badam Ramana Murthy, Babu Narayanan, Chang Kuo Chang, Sohan Singh Mehta, Kuan Pei Yap, Desmond R. Lim
Author Affiliations +
Abstract
To miniaturize optical passive components or to have optical interconnects replace the current copper/low k interconnects for clock distribution, super high index contrast optics are needed because they allow optical waveguides with small bending radius, ie. < 50um. Silicon nitride core on oxide cladding has loss of <0.1dB/180° for 20um bending radius. However, coupling loss from the fiber to SiN waveguides, with 0.7umx0.7um cross section for single mode, is very large, > 20dB. To reduce the coupling loss, our approach is to have a double-core architecture, where fiber is first coupled to fiber matched waveguide, and then coupling from fiber match waveguide to SiN waveguide through a spot size mode converter. We have found the mode converter loss is reduced by 8dB by reducing the tip of the taper from 0.35um to 0.15um. In this paper, we are reported results of tips with less than 0.1um. We also describe the fabrication technology that enables us to make such fine tip with smooth surfaces.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
My T. Doan, Chi Fo Tsang, Badam Ramana Murthy, Babu Narayanan, Chang Kuo Chang, Sohan Singh Mehta, Kuan Pei Yap, and Desmond R. Lim "Spot size mode converter for efficient coupling to SiN waveguides", Proc. SPIE 5577, Photonics North 2004: Optical Components and Devices, (20 December 2004); https://doi.org/10.1117/12.567578
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KEYWORDS
Waveguides

Fiber couplers

Silicon

Cladding

Etching

Wave propagation

Clocks

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