Phase-shifting interferometry using an SHG blue laser diode

Jun Chen; Yoh Tanaka; Michio Kiyohara; Motosuke Kiyohara

doi:10.1117/12.577051

20 January 2005 Phase-shifting interferometry using an SHG blue laser diode

Jun Chen, Yoh Tanaka, Michio Kiyohara, Motosuke Kiyohara

Author Affiliations +

Proceedings Volume 5633, Advanced Materials and Devices for Sensing and Imaging II; (2005) https://doi.org/10.1117/12.577051
Event: Photonics Asia, 2004, Beijing, China

Abstract

A digital phase-measurement interferometer using a tunable SHG blue laser at 410nm was developed. This system enables us to test high NA lenses used in high-density optical storage devices. Excellent features such as wavelength tunability, narrow spectral linewidth, and wavelength stability, make the SHG laser very suitable as a light source for a phase-shifting interferometer working at blue-violet wavelength region. We investigated the tuning characteristic of the SHG laser as a function of DBR-section current and found that the wavelength-changing ratio was 0.0017nm/mA. An unbalanced Twyman-Green interferometer with the SHG laser was composed to measure the transmitted wavefront of an optical pickup lens with a NA of 0.85. The theory and experimental results are presented.

Citation Download Citation

Jun Chen, Yoh Tanaka, Michio Kiyohara, and Motosuke Kiyohara "Phase-shifting interferometry using an SHG blue laser diode", Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); https://doi.org/10.1117/12.577051

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