A method of self-calibration for integrated capacitive sensors

Peter M. Johnson; David V. Thiel; Daniel A. James; Mark Cornelius

doi:10.1117/12.581977

28 February 2005 A method of self-calibration for integrated capacitive sensors

Peter M. Johnson, David V. Thiel, Daniel A. James, Mark Cornelius

Proceedings Volume 5649, Smart Structures, Devices, and Systems II; (2005) https://doi.org/10.1117/12.581977
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

In a sensor employing changes in capacitance the introduction of two additional reference electrodes can assist in the minimization and correction of errors introduced in the manufacturing process and from changes in environmental conditions. The two extra electrodes that reflect the maximum and minimum values of the measuring electrode are constructed during the same lithographic process and in close proximity to the active electrode. In preliminary trials of 79 sensors the uncorrected error in reading was nearly 20% of full scale and dropped to 4% of full scale after applying the correction. The technique with support electronics printed on flexible substrates allow the sensor to be small, integrated and “smart”.

Citation Download Citation

Peter M. Johnson, David V. Thiel, Daniel A. James, and Mark Cornelius "A method of self-calibration for integrated capacitive sensors", Proc. SPIE 5649, Smart Structures, Devices, and Systems II, (28 February 2005); https://doi.org/10.1117/12.581977

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