High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors

Joachim Gerhardt; Ralf Geckeler; Michael Schulz; Clemens Elster

doi:10.1117/12.612492

13 June 2005 High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors

Joachim Gerhardt, Ralf Geckeler, Michael Schulz, Clemens Elster

Author Affiliations +

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612492
Event: Optical Metrology, 2005, Munich, Germany

Abstract

A scanning system consisting of an angle sensor and coupled distance sensors is used for high-accuracy profile form measurements of optical surfaces. This system allows both scanning stage errors and systematic errors of the distance sensors to be estimated. Additionally, a high lateral resolution is achieved. The optical surface profile is reconstructed from the measurements made by the angle and distance sensors by application of least-squares. A test set-up is presented and the results of optical form measurements are shown.

Citation Download Citation

Joachim Gerhardt, Ralf Geckeler, Michael Schulz, and Clemens Elster "High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612492

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