The focusing action of refractive microlens by rigorous method

Juan Liu; Ben-Yuan Gu D.V.M.; Bi-Zhen Dong; Guo-Zhen Yang

doi:10.1117/12.612490

13 June 2005 The focusing action of refractive microlens by rigorous method

Juan Liu, Ben-Yuan Gu D.V.M., Bi-Zhen Dong, Guo-Zhen Yang

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612490
Event: Optical Metrology, 2005, Munich, Germany

Abstract

We investigate the focusing action of refractive microlens based on the rigorous electromagnetic theory by boundary element method. We numerically simulate total electric-field patterns, the electric-field intensity distributions on the focal plane, and their diffractive efficiencies at the focal spots for describing the focusing behaviours of these microlenses with continuous and multilevel surface-envelopes. Focusing action of incident beam with a certain angle of inclination is indagated as well. The present numerical and graphical results may provide an useful information for the analysis and the design of refractive elements in micro-optics.

Citation Download Citation

Juan Liu, Ben-Yuan Gu D.V.M., Bi-Zhen Dong, and Guo-Zhen Yang "The focusing action of refractive microlens by rigorous method", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612490

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