Zeeman laser for straightness measurements

Janusz Rzepka; Grzegorz Budzyn; Wojciech Fraczek; Marcin Bielenin

doi:10.1117/12.612658

13 June 2005 Zeeman laser for straightness measurements

Janusz Rzepka, Grzegorz Budzyn, Wojciech Fraczek, Marcin Bielenin

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612658
Event: Optical Metrology, 2005, Munich, Germany

Abstract

In the paper we present the prototype of a straightness measuring device that uses a frequency stabilized Zeeman He-Ne laser. The He-Ne laser line is split by Zeeman effect into two circularly polarized laser beams. The frequency of the radiations differ of 1,2 MHz. The surface stabilized ferroelectric liquid crystal cell is used to stabilize the laser frequency. As the result of the laser frequency stabilization the power of both radiation is equal. The circular polarizations of two laser beams are converted into two linear polarizations perpendicular to each other. The two laser beams pass close to the measured axis. Along the axis the analyzing probe is moved. The analyzing probe changes the ratio of the power of the horizontal to the vertical polarization. This ratio is analyzed by the receiver composed of the ferroelectric liquid crystal switcher, the polarizer and the detector. The straightness of 2 m long optical bench was measured with this techniques. The resolution of 0,1 μm and the accuracy of 0.5 μm were obtained. The accuracy of presented technique is not so good as in the methods using laser interferometer but is comparable with methods using PSD, quadrant detectors or CCD at the same time offering bigger resolution.

Citation Download Citation

Janusz Rzepka, Grzegorz Budzyn, Wojciech Fraczek, and Marcin Bielenin "Zeeman laser for straightness measurements", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612658

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