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The influence of the buffer gases on the discharge homogeneity of F2doped excimer laser gas mixtures is investigated in a small x-ray preionised high-pressure discharge chamber. The spatial and temporal development of discharges in He/F2 and Ne/F2 gas mixtures is monitored via its fluorescence using an intensified CCD camera with a gating time of 300 ps. The formation and development of discharge filaments in He/F2 gas mixtures is completely different from that in Ne/F2. Under the same start up conditions, discharges in Ne/F2 are dominated by cathode hotspots where as no hot spots are visible in discharges in He/F2 gas mixtures. However, the discharges in Ne/F2 gas mixtures appear to be more uniform even though the discharge width decreases in time and hotspots are persistent on the cathode surface.
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D. Mathew, H. M. J. Bastiaens, K.-J. Boller, P. J. M. Peters, "Spatial and temporal development of discharge instabilities in fluorine based excimer laser gas mixtures," Proc. SPIE 5958, Lasers and Applications, 59581A (11 October 2005); https://doi.org/10.1117/12.622900