Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis

Xiaodong Hu; Gang Liu; Tong Guo; Chunguang Hu; Xiaotang Hu

doi:10.1117/12.667872

7 February 2006 Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis

Xiaodong Hu, Gang Liu, Tong Guo, Chunguang Hu, Xiaotang Hu

Author Affiliations +

Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 60320N (2006) https://doi.org/10.1117/12.667872
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Microscopic interferometry is up to now the most widely used technique for microstructure surface profiling, and is also capable of measuring out-of-plane motion and deflection of microstructures with stroboscopic illumination. In this paper we put forward a stroboscopic Mirau microscopic interferometer system, which is built of commercially available components and instruments based on virtual instrument technology. An improved Fourier transform method (FTM) is described, and two interferograms with different phase shifting are processed for achieving reliable phase demodulation. The system is applied to the measurement of microcantilever surface profile and out-of-plane deflection and motion. Finally, experiment results are compared with that of temporal phase-shifting method for validating the process method.

Citation Download Citation

Xiaodong Hu, Gang Liu, Tong Guo, Chunguang Hu, and Xiaotang Hu "Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320N (7 February 2006); https://doi.org/10.1117/12.667872

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KEYWORDS

Motion measurement

Interferometry

Phase shifts

Microelectromechanical systems

Phase shifting

Motion analysis

Bandpass filters

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