Fabricating microelectrode by electrochemical micromachining

Zhenlong Wang; Baoguo Zhu; Guohui Cao

doi:10.1117/12.664344

20 February 2006 Fabricating microelectrode by electrochemical micromachining

Zhenlong Wang, Baoguo Zhu, Guohui Cao

Proceedings Volume 6041, ICMIT 2005: Information Systems and Signal Processing; 60411P (2006) https://doi.org/10.1117/12.664344
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

Based on the present situation of microelectrode machining, electrochemical micromachining (EMM) was regarded as one of the most advanced micromachining techniques. The machining technology of microelectrode was put forward by the method of high frequency short pulses in electrochemical machining (ECM). The shaping principle of microelectrode was analyzed. Then a suitable EMM system was designed. Through the research of technologic experiments, a microelectrode is fabricated with diameter 30μm and top radius 100nm, which is made of tungsten filament. This could provide microelectrode for further electro-machining or micro probe for scanning probe microscopy. The surface property and the machining capability of the microelectrode are compared with the microelectrode fabricated by Electrical Discharge Machining (EDM) at last. The superiority of the microelectrode fabricated by ECM is showed off fully. Further research on EMM will provide more opportunities for ECM in the field of micromachining.

Citation Download Citation

Zhenlong Wang, Baoguo Zhu, and Guohui Cao "Fabricating microelectrode by electrochemical micromachining", Proc. SPIE 6041, ICMIT 2005: Information Systems and Signal Processing, 60411P (20 February 2006); https://doi.org/10.1117/12.664344

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