The integration of optical thin film filters by hydrofluoric acid bonding

L. Chen; K. Kintaka; H. Nishimura; K. Fukumi; J. Nishii; K. Hirao

doi:10.1117/12.674193

9 June 2006 The integration of optical thin film filters by hydrofluoric acid bonding

L. Chen, K. Kintaka, H. Nishimura, K. Fukumi, J. Nishii, K. Hirao

Author Affiliations +

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 614906 (2006) https://doi.org/10.1117/12.674193
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A hydrofluoric acid (HF) bonding method has been applied for the thin film filters integration. The quality of bonding was examined by the evaluation of bonding strength and the observation of bonding interface. The bonding strength depends on the applied pressure and temperature during bonding. The maximum bonding strength was more than 10 MPa. High quality bonding interface was observed by scanning electron microscope and transmission electron microscope. A color filer array of red, green and blue (RGB) was designed to separate the white light. The filters were integrated into a glass body successfully by HF bonding. Its transmittance spectra were unchanged after heating at 450^oC for 20 hours. In addition, integration of filters was carried out to fabricate an optical demutiplexer for coarse wavelength division multiplexing system. It was confirmed that the integrated filter array acted as a demutiplexer.

Citation Download Citation

L. Chen, K. Kintaka, H. Nishimura, K. Fukumi, J. Nishii, and K. Hirao "The integration of optical thin film filters by hydrofluoric acid bonding", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614906 (9 June 2006); https://doi.org/10.1117/12.674193

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KEYWORDS

Glasses

Optical filters

Coarse wavelength division multiplexing

RGB color model

Thin films

Interfaces

Multilayers

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