Self-calibration of wavefront testing interferometers by use of diffractive elements

Stephan Reichelt; Hans Tiziani; Hans Zappe

doi:10.1117/12.680660

14 August 2006 Self-calibration of wavefront testing interferometers by use of diffractive elements

Stephan Reichelt, Hans Tiziani, Hans Zappe

Proceedings Volume 6292, Interferometry XIII: Techniques and Analysis; 629205 (2006) https://doi.org/10.1117/12.680660
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

Self-calibration techniques in interferometry imply the absolute determination of the interferometer's systematic error without the need for a high-quality, precisely-known calibration standard. By taking separate measurements at different positions and under different orientations, the interferometer's error can be determined in an absolute manner even with non-perfect optical elements. This paper discusses the versatile possibilities of using diffractive optical elements as calibration tools in wavefront testing interferometry.

Citation Download Citation

Stephan Reichelt, Hans Tiziani, and Hans Zappe "Self-calibration of wavefront testing interferometers by use of diffractive elements", Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 629205 (14 August 2006); https://doi.org/10.1117/12.680660

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