Paper
26 April 2007 Experimental study of disharge characteristics and fluorine atom yield on DC discharge of NF3/He
Liping Duo, Shukai Tang, Haijun Yu, Jian Wang, Liucheng Li, Yuqi Jin, Bailing Yang, Fengting Sang
Author Affiliations +
Proceedings Volume 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; 63462S (2007) https://doi.org/10.1117/12.739116
Event: XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2006, Gmunden, Austria
Abstract
DC discharge characteristics of NF3/He have investigated experimentally at many kinds of experimental conditions, for example, different electrodes material, a few of distance between the two electrodes, flow rates of the gas NF3 or He, a series of series-wound resistances and give the steady and optimum discharge parameters finally. Fluorine atom yield from the DC discharge of NF3/He have studied experimentally and the relationship of fluorine atom yield and the load power is shown for the first time.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Liping Duo, Shukai Tang, Haijun Yu, Jian Wang, Liucheng Li, Yuqi Jin, Bailing Yang, and Fengting Sang "Experimental study of disharge characteristics and fluorine atom yield on DC discharge of NF3/He", Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63462S (26 April 2007); https://doi.org/10.1117/12.739116
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KEYWORDS
Fluorine

Chemical species

Electrodes

Metals

Copper

Chemical lasers

iodine lasers

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