Changing face of surface metrology

David J. Whitehouse

doi:10.1117/12.716966

24 October 2006 Changing face of surface metrology

David J. Whitehouse

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 63571J (2006) https://doi.org/10.1117/12.716966
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

In common with most disciplines surface metrology is having to evolve in order to meet the new requirements demanded by miniaturization and the increased use of semi conductor planar technology. Changes are taking place in theory as well as in the other constituents of an engineering design such as material properties and new manufacturing processes. In this paper a number of issues will be discussed. They will be by no means a comprehensive list but sufficient will be investigated to give an idea of the nature and scope on the problem. Amongst the topics covered will be nomenclature, some mechanical properties, force balance etc. There will be a look back at the way in which surface metrology evolved to see if lessons can be learned.

Citation Download Citation

David J. Whitehouse "Changing face of surface metrology", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63571J (24 October 2006); https://doi.org/10.1117/12.716966

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