Fabrication of a microfluidic bioarray device using laser-machined surface microstructures

Tadatake Sato; Ryozo Kurosaki; Aiko Narazaki; Yoshizo Kawaguchi; Hiroyuki Niino

doi:10.1117/12.699680

13 March 2007 Fabrication of a microfluidic bioarray device using laser-machined surface microstructures

Tadatake Sato, Ryozo Kurosaki, Aiko Narazaki, Yoshizo Kawaguchi, Hiroyuki Niino

Proceedings Volume 6458, Photon Processing in Microelectronics and Photonics VI; 64580B (2007) https://doi.org/10.1117/12.699680
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

Laser-induced backside wet etching (LIBWE) method has been developed as a technique for micromachining of transparent materials. Such technique can be applied for fabricating microfluidic devices used as "Lab on a Chip" or total microanalysis system (μTAS). In such devices, various functions are integrated onto one chip. Microstructure with 1μm resolution fabricated within microfluidic channels can afford additional functions to the chip. Color-encoded microbeads with surface functional groups randomly arranged in the microstructure can be used for bioarray analyses. We have fabricated a novel microfluidic device incorporating two-dimensional array of microbeads with 10 μm diameter. The performance of the microfluidic bead array was confirmed by a capturing experiment of DNA.

Citation Download Citation

Tadatake Sato, Ryozo Kurosaki, Aiko Narazaki, Yoshizo Kawaguchi, and Hiroyuki Niino "Fabrication of a microfluidic bioarray device using laser-machined surface microstructures", Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 64580B (13 March 2007); https://doi.org/10.1117/12.699680

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