Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

T. Bannuru; S. Narksitipan; W. L. Brown; R. P. Vinci

doi:10.1117/12.700834

19 January 2007 Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches

T. Bannuru, S. Narksitipan, W. L. Brown, R. P. Vinci

Proceedings Volume 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; 646306 (2007) https://doi.org/10.1117/12.700834
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Au, Au-V solid solution, and Au-V₂O₅ dispersion films were fabricated for comparison of electrical and mechanical characteristics. Resistivity and nanoindentation hardness increased with increasing V content in all films, but the ratio of resistivity increase to hardness increase was much lower for the Au-V₂O₅ films. Measurements of contact force and electrical contact resistance between pairs of Au or Au-V films show that increased hardness and resistivity in the alloy films results in higher contact resistance and less adhesion than in pure Au. These results imply that the Au-V₂O₅ films may exhibit attractive behavior when used in a contact configuration, but this has not yet been tested.

Citation Download Citation

T. Bannuru, S. Narksitipan, W. L. Brown, and R. P. Vinci "Effects of V additions on the mechanical behavior of Au thin films for MEMS contact switches", Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 646306 (19 January 2007); https://doi.org/10.1117/12.700834

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