Nanoimprinting with SU-8 epoxy resists

Donald W. Johnson; Harris Miller; Mike Kubenz; Freimut Reuther; Gabi Gruetzner

doi:10.1117/12.713710

22 March 2007 Nanoimprinting with SU-8 epoxy resists

Donald W. Johnson, Harris Miller, Mike Kubenz, Freimut Reuther, Gabi Gruetzner

Proceedings Volume 6517, Emerging Lithographic Technologies XI; 65172A (2007) https://doi.org/10.1117/12.713710
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

This paper reports on the evaluation of XP SU-8 4000NPG for potential use in nanoimprint applications using hot UV imprint lithography. The use of this material is advantageous in that it can be imprinted, exposed and sufficiently cured all at the same temperature without any temperature cycling providing an isothermal process leading to short cycle times. Uncured XP SU-8 4000NPG has a Tg below 10ºC, yet its films are sufficiently robust to be handled at temperatures from 40 to 70ºC. This resist exhibits excellent flow properties in this temperature range, which is also a range where the post exposure bake of the exposed areas is sufficient to lock in the imprinted patterns and allow easy stamp removal. Wafers can be spin coated with the 4000NPG to provide films of less than 100nm thickness to more than 500 nm and subsequently baked to remove the residual coating solvent. Precoated wafers are introduced into the imprint tool and placed on a pre-heated chuck for a few seconds to reach the set temperature, and then the imprint stamp is applied under pressure for 30-60 sec to allow adequate time to properly fill the mold. While still in the mold, the resist is exposed through the transparent stamp and simultaneously cured for as little as 10 sec in order to remove the stamp without tearing or pattern deformation. The wafer can then be immediately removed from the imprint tool. The optimal temperature is a balance between resist flow, cure rate and the thermal stresses imparted into the cured film at the higher operating temperatures.

Citation Download Citation

Donald W. Johnson, Harris Miller, Mike Kubenz, Freimut Reuther, and Gabi Gruetzner "Nanoimprinting with SU-8 epoxy resists", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65172A (22 March 2007); https://doi.org/10.1117/12.713710

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