Ultrasensitive nanomechanical photonic microsensor

Carlos Angulo Barrios

doi:10.1117/12.723390

12 June 2007 Ultrasensitive nanomechanical photonic microsensor

Carlos Angulo Barrios

Proceedings Volume 6593, Photonic Materials, Devices, and Applications II; 65930X (2007) https://doi.org/10.1117/12.723390
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

A novel ultrasensitive integrated nanomechanical optical sensor is proposed and analyzed. The photonic device consists of a silicon nitride disk resonator formed by a horizontal slot-waveguide acting as a circular cantilever. The device sensitivity results from the product of the sensitivities of the slot-waveguide and the disk resonator. A deflection sensitivity of 11.5 nm^-1 is predicted, representing an enhancement of 4 orders of magnitude as compared to state-of-the-art microcantilever sensors.

Citation Download Citation

Carlos Angulo Barrios "Ultrasensitive nanomechanical photonic microsensor", Proc. SPIE 6593, Photonic Materials, Devices, and Applications II, 65930X (12 June 2007); https://doi.org/10.1117/12.723390

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available