Laser interferometry-phasometry of nanodisplacement

Zh. Zhelkobaev; V. V. Kalendin; M. A. Samorukov; P. A. Todua

doi:10.1117/12.725603

11 January 2007 Laser interferometry-phasometry of nanodisplacement

Zh. Zhelkobaev, V. V. Kalendin, M. A. Samorukov, P. A. Todua

Proceedings Volume 6594, Lasers for Measurements and Information Transfer 2006; 65940A (2007) https://doi.org/10.1117/12.725603
Event: Lasers for Measurements and Information Transfer 2006, 2006, St. Petersburg, Russian Federation

Abstract

This work presents a conception of metrological support of nanoscaled linear size and displacement measurements, based on laser interferomerty-phasemetry methods. New methods of high-precision laser interferometers calibration with accuracy not lower than 10^-10m based on laser phasemetry are announced and practical application of these methods for scanning probe microscopes, used in nanotechnologies is considered.

Citation Download Citation

Zh. Zhelkobaev, V. V. Kalendin, M. A. Samorukov, and P. A. Todua "Laser interferometry-phasometry of nanodisplacement", Proc. SPIE 6594, Lasers for Measurements and Information Transfer 2006, 65940A (11 January 2007); https://doi.org/10.1117/12.725603

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