Measuring Step Heights Using An Optical Profiler

Katherine Creath

doi:10.1117/12.938629

25 November 1986 Measuring Step Heights Using An Optical Profiler

Katherine Creath

Proceedings Volume 0661, Optical Testing and Metrology; (1986) https://doi.org/10.1117/12.938629
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

Two-wavelength phase-shifting interferometry is applied to an interference phase-measuring microscope enabling the measurement of step heights. The surface is effectively tested at a synthesized equivalent wavelength λeq = λaλb/|λa - λb| using measurements made at wavelengths λa and λb. The rms repeatabilty of the technique is λ/1000 at the equivalent wavelength. To improve the precision of the data, the phase ambiguities in the single wavelength data are removed using the equivalent wavelength results to determine fringe orders. When this correction is made, a measurement dynamic range (feature height/rms repeatability) of 104 is obtainable. This technique enables features of up to 10 μm in height to be measured with a 10x objective.

Citation Download Citation

Katherine Creath "Measuring Step Heights Using An Optical Profiler", Proc. SPIE 0661, Optical Testing and Metrology, (25 November 1986); https://doi.org/10.1117/12.938629

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