Realisation of quantitative Makyoh topography using a digital micromirror device

Ferenc Riesz; I. E. Lukács; J. P. Makai

doi:10.1117/12.726388

18 June 2007 Realisation of quantitative Makyoh topography using a digital micromirror device

Ferenc Riesz, I. E. Lukács, J. P. Makai

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66160L (2007) https://doi.org/10.1117/12.726388
Event: Optical Metrology, 2007, Munich, Germany

Abstract

Makyoh topography (MT) is an optical characterisation tool for flatness testing of mirror-like surfaces. In MT, the surface is illuminated by a collimated light beam, and the reflected image is detected on a screen placed some distance away from the sample. Because of the focussing/defocussing action of the surface undulaations, the image shows intensity variations related to the sample morphology. In its original form, MT is qualitative only. By inserting a structured mask (e.g., a grid) into the path of the illuminating beam, the surface topography can be calculated by the integration of the gradients obtained by the determination of the displacements of the grid node positions, compared to a reference flat, similarly to a wavefront sensor. A DMD provides an easy and verstile way of realisation of such a structured mask. In this paper, we report on a quantitative MT set-up using a programmed DMD. Possibilities of the realisation of different mask patterns are analysed. The results are compared to interferometry.

Citation Download Citation

Ferenc Riesz, I. E. Lukács, and J. P. Makai "Realisation of quantitative Makyoh topography using a digital micromirror device", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160L (18 June 2007); https://doi.org/10.1117/12.726388

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