Neutral nanocluster chemistry studied by soft x-ray laser single-photon ionization: application to soft x-ray optical surface contamination studies: SimOn and TimOn

S. Heinbuch; F. Dong; J. J. Rocca; E. R. Bernstein

doi:10.1117/12.731911

12 October 2007 Neutral nanocluster chemistry studied by soft x-ray laser single-photon ionization: application to soft x-ray optical surface contamination studies: Si_mO_n and Ti_mO_n

S. Heinbuch, F. Dong, J. J. Rocca, E. R. Bernstein

Author Affiliations +

Proceedings Volume 6702, Soft X-Ray Lasers and Applications VII; 67020K (2007) https://doi.org/10.1117/12.731911
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Metal oxide clusters are employed in studies to help understand an important, specific, type of surface chemical problem: the contamination of soft x-ray mirrors by carbon deposits. Herein we report nanocluster chemistry studies that are relevant to the use of silicon oxide and titanium oxide capping layers. Systems involving Si_mO_n, and Ti_mO_n metal oxide nanoclusters are generated in a pulsed supersonic expansion/ablation source and passed through a reactor containing any reactant desired. The reaction products of these gas phase clusters are ionized using single photon ionization from a desk-top sized 46.9 nm Ne-like Ar laser providing the advantage of little or no fragmentation of desired nanoclusters. The ionized products are analyzed by a time of flight mass spectrometer and experimental results supply useful information related to condensed phase soft x-ray optical surfaces. The results illustrate the great potential of the use of very compact soft x-ray lasers in photochemistry and photophysics studies.

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S. Heinbuch, F. Dong, J. J. Rocca, and E. R. Bernstein "Neutral nanocluster chemistry studied by soft x-ray laser single-photon ionization: application to soft x-ray optical surface contamination studies: Si_mO_n and Ti_mO_n", Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020K (12 October 2007); https://doi.org/10.1117/12.731911

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KEYWORDS

Silicon

Oxides

Titanium

Ionization

X-rays

X-ray optics

Mirrors

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