Laser structuring of conducting films on transparent substrates

G. Račiukaitis; M. Brikas; G. Darčianovas; D. Ruthe; K. Zimmer

doi:10.1117/12.751895

28 June 2007 Laser structuring of conducting films on transparent substrates

G. Račiukaitis, M. Brikas, G. Darčianovas, D. Ruthe, K. Zimmer

Author Affiliations +

Proceedings Volume 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies; 67320C (2007) https://doi.org/10.1117/12.751895
Event: International Conference on Lasers, Applications, and Technologies '07, 2007, Minsk, Belarus

Abstract

The fast growing market of organic electronics, including organic light-emitting devices (OLED), Solar cells and radio-frequency identification devices (RFID), stimulates development of versatile technologies for patterning the thin-film materials on rigid and flexible substrates. Thin films of the transparent conducting oxides (TCO) are important materials for making transparent contacts, conductors or antennas in such devices. High repetition rate lasers with a short, picosecond pulse duration offer new possibilities for high efficiency structuring of transparent conductors on glass and other substrates. The results of ablation of the indium-tin oxide (ITO) layer on glass and ITO and ZnO layers on polymers with picosecond lasers at various wavelengths are presented. Laser radiation initiated ablation of the material, forming trenches in TCO. UV radiation at the 266 nm provided the widest working window for TCO ablation without damage of the substrate. Subcomponents of the thin-film devices were made in order to test the structuring technology.

Citation Download Citation

G. Račiukaitis, M. Brikas, G. Darčianovas, D. Ruthe, and K. Zimmer "Laser structuring of conducting films on transparent substrates", Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 67320C (28 June 2007); https://doi.org/10.1117/12.751895

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