Growth of self-aligned single-walled carbon nanotubes by laser-assisted chemical vapor deposition

M. Mahjouri; Y. S. Zhou; W. Xiong; Y. F. Lu

doi:10.1117/12.762171

23 February 2008 Growth of self-aligned single-walled carbon nanotubes by laser-assisted chemical vapor deposition

M. Mahjouri, Y. S. Zhou, W. Xiong, Y. F. Lu

Proceedings Volume 6880, Laser-based Micro- and Nanopackaging and Assembly II; 68800P (2008) https://doi.org/10.1117/12.762171
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Controllable growth of self-aligned single-walled carbon nanotubes (SWNTs) was developed using laser-assisted chemical vapor deposition (LCVD) method. By integrating both electrical-field and gas-flow induced orientation effects in the LCVD process, SWNT growth direction was decided. According to Raman measurements, narrow diameter distribution of the SWNTs was realized by controlling reaction temperature and catalyst size. Individual SWNT bridging opposite Mo electrodes was achieved by creating local electrical field using point-to-point electrodes. Back-gated single-walled carbon nanotube based field-effect transistors (SWNT-FETs) were fabricated using LCVD method, and showed typical p-type behavior.

Citation Download Citation

M. Mahjouri, Y. S. Zhou, W. Xiong, and Y. F. Lu "Growth of self-aligned single-walled carbon nanotubes by laser-assisted chemical vapor deposition", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 68800P (23 February 2008); https://doi.org/10.1117/12.762171

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