Epitaxial growth and electrical properties of Ba0.6Sr0.4TiO3 thin films with conductive La0.5Sr0.5CoO3 bottom electrodes

W. F. Qin; J. Xiong; J. Zhu; J. L. Tang; W. B. Luo; X. H. Wei; Y. Zhang; Y. R. Li

doi:10.1117/12.792276

11 March 2008 Epitaxial growth and electrical properties of Ba_0.6Sr_0.4TiO₃ thin films with conductive La_0.5Sr_0.5CoO₃ bottom electrodes

W. F. Qin, J. Xiong, J. Zhu, J. L. Tang, W. B. Luo, X. H. Wei, Y. Zhang, Y. R. Li

Author Affiliations +

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69840I (2008) https://doi.org/10.1117/12.792276
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Epitaxial Ba_0.6Sr_0.4TiO₃ (BST) thin films were deposited on LaAlO₃ (LAO) substrates with the conductive metallic oxide La_0.5Sr_0.5CoO₃ (LSCO) film as a bottom electrode by pulsed laser deposition (PLD). X-ray diffraction θ~2θ and Φ scan showed that the epitaxial relationship of BST /LSCO /LAO was [001] BST//[001] LSCO//[001] LAO. The atomic force microscope (AFM) revealed a smooth and crack-free surface of BST films on LSCO-coated LAO substrate with the average grain size of 120 nm and the RMS of 1.564nm for BST films. Pt/BST/LSCO capacitor was fabricated to perform Capacitance-Voltage measurement indicating good insulating characteristics. For epitaxial BST film, the dielectric constant and dielectric loss were determined as 471 and 0.03, respectively. The tunabilty was 79.59% and the leakage current was 2.63×10^-7 A/cm² under an applied filed of 200 kV/cm.

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W. F. Qin, J. Xiong, J. Zhu, J. L. Tang, W. B. Luo, X. H. Wei, Y. Zhang, and Y. R. Li "Epitaxial growth and electrical properties of Ba_0.6Sr_0.4TiO₃ thin films with conductive La_0.5Sr_0.5CoO₃ bottom electrodes", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69840I (11 March 2008); https://doi.org/10.1117/12.792276

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