Study of crystallization and phase mixing in SiO2/SiOx superlattices through form birefringence measurements

Mher Ghulinyan; Minghua Wang; Antonino Picciotto; Georg Pucker

doi:10.1117/12.780547

1 May 2008 Study of crystallization and phase mixing in SiO₂/SiO_x superlattices through form birefringence measurements

Mher Ghulinyan, Minghua Wang, Antonino Picciotto, Georg Pucker

Author Affiliations +

Proceedings Volume 6996, Silicon Photonics and Photonic Integrated Circuits; 69960G (2008) https://doi.org/10.1117/12.780547
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

We report on the evolution of form birefringence due to thermal annealing in SiO_x/SiO₂ superlattices (SL) deposited by Plasma enhanced chemical vapor deposition (PECVD). Superlattices with layer thickness of 5 or 8 nm for both the SiO_x and SiO₂ layers were annealed at different temperatures from RT to 1150°C. Variable angle spectroscopic ellipsometry (VASE) was used to measure the negative form birefringence β and total thickness of the superlattice. The evolution of the ordinary (n₀) and extraordinary (n_e) refractive indices, the form birefringence and the thickness can be correlated with processes like sintering, phase separation in the SiO_x-layers and roughening of the SiO₂/SiO_x interface.

Citation Download Citation

Mher Ghulinyan, Minghua Wang, Antonino Picciotto, and Georg Pucker "Study of crystallization and phase mixing in SiO₂/SiO_x superlattices through form birefringence measurements", Proc. SPIE 6996, Silicon Photonics and Photonic Integrated Circuits, 69960G (1 May 2008); https://doi.org/10.1117/12.780547

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