Sub-wavelength resolution laser lithography in the field of MEMS

Gabriel Moagar-Poladian

doi:10.1117/12.801971

29 April 2008 Sub-wavelength resolution laser lithography in the field of MEMS

Gabriel Moagar-Poladian

Proceedings Volume 7007, INDLAS 2007: Industrial Laser Applications; 70070L (2008) https://doi.org/10.1117/12.801971
Event: INDLAS 2007: Industrial Laser Applications, 2007, Bran, Romania

Abstract

In this paper I present some techniques by which MEMS structures with sub-wavelength resolution can be obtained when using laser lithography. I concentrate on two major techniques: single photon and multi-photon absorption processes.

Citation Download Citation

Gabriel Moagar-Poladian "Sub-wavelength resolution laser lithography in the field of MEMS", Proc. SPIE 7007, INDLAS 2007: Industrial Laser Applications, 70070L (29 April 2008); https://doi.org/10.1117/12.801971

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