Paper
2 September 2008 Characterization and optimization of the deposition process of aluminum top electrodes for organic devices
S. Mozer, D. Schneidenbach, H. Blei, M. Lehnhardt, T. Riedl, M. Hoping, H-H. Johannes, W. Kowalsky
Author Affiliations +
Abstract
We investigated the effect of thermal stress, caused by the deposition of aluminum on top of an organic light emitting diode (OLED), on the device performance and proved our simulated results by experimental tests. Concerning the temperature of the substrate, we found a much larger influence of thermal radiation, caused by the evaporation source and the environmental setting compared to the kinetic and thermal energy of the deposited material itself. Due to these results, we developed a new system for metal deposition, using the flash-evaporation technique. Using it, we were able to minimize the influence of thermal radiation and geometry on the evaporation. Therefore the substrate heating was reduced by more than 90 % and the photometric efficiencies of test-devices were improved slightly. Additionally the time of deposition and retention was lowered by 90 %, with an increased material yield of more than 55 % at the same time. The resistance of the conducting layer decreases by two orders of magnitude, caused by emerging micro crystals. Surprisingly, the roughness of the surface actually decreased slightly.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Mozer, D. Schneidenbach, H. Blei, M. Lehnhardt, T. Riedl, M. Hoping, H-H. Johannes, and W. Kowalsky "Characterization and optimization of the deposition process of aluminum top electrodes for organic devices", Proc. SPIE 7051, Organic Light Emitting Materials and Devices XII, 70510A (2 September 2008); https://doi.org/10.1117/12.794568
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KEYWORDS
Aluminum

Temperature metrology

Deposition processes

Crystals

Organic light emitting diodes

Electrodes

Resistance

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