Mechatronic system design for tiled large-aperture grating

Lihua Lu; Yingchun Liang; Tao Jiang; Fuli Yu; Qingchun Zhang

doi:10.1117/12.831071

20 May 2009 Mechatronic system design for tiled large-aperture grating

Lihua Lu, Yingchun Liang, Tao Jiang, Fuli Yu, Qingchun Zhang

Proceedings Volume 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 72823S (2009) https://doi.org/10.1117/12.831071
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

To obtain a large-aperture high damage threshold grating compressor for a Perawatt laser system, the multi-piece tiled grating is an effective method. In order to avoid the influence of tiling error on the temporal and spatial characteristics of grating, the rotation error between sub-gratings needs to be controlled in 1μrad, the piston errors including in-plane shift and out-of-plane shift errors need to be controlled in 20nm. One mechatronic system is presented for tiled large-aperture planar gratings based on parallel mechanism with five freedoms. Five uniform feed drives are improved dual mode mechanism with servomotor and ballscrew as macro-actuator and piezoelectric transducer (PZT) with resolution of 1.2nm as micro-actuator. Key components of the mechanism are optimum designed based on finite element method (FEM) to achieve proper dynamics of the mechanical system. The proposed system is applied in experiment to tile two sub-aperture gratings of 200mm×400mm. Far-field diffraction patterns proves that the tiled grating can meet requirements of accuracy and stability of laser system.

Citation Download Citation

Lihua Lu, Yingchun Liang, Tao Jiang, Fuli Yu, and Qingchun Zhang "Mechatronic system design for tiled large-aperture grating", Proc. SPIE 7282, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 72823S (20 May 2009); https://doi.org/10.1117/12.831071

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