Paper
24 August 2009 The spatial detection on distribution of metal nano-particles during femtosecond laser ablation
Na Li, Xiaochang Ni, Ching-yue Wang
Author Affiliations +
Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 738109 (2009) https://doi.org/10.1117/12.835964
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China
Abstract
To form a better uniform metal nano-particles (Nps) film, the spatial distribution of Nps produced by femtosecond (fs) pulsed-laser deposition (PLD) method has been studied in detail. Firstly, the spatial distribution of Nps is collected by a slice of harden plastic under different laser fluence. Secondly, the deposition slices are scanned into jpg images. Then, the gray intensity of Nps deposit in the images has been used to have information of the number of deposited Nps. The data are analyzed by Matlab, Excel and Origin software. Experimental results show that the Nps' spatial distribution is following the Anisimov gas expansion model, in which a k value shows a descending trend with the increasing of laser fluence. Most Nps are flying to a narrow angle θ (θ≈0-30 degree), which is departing away the vertical direction of material surface. A 3cm deposition distance and θ≈30 degree are chosen to deposit Cu Nps film. The deposited Cu film seems not very compact and the Nps can be seen clearly in 0.7 J/cm2 with 500s deposition time, and the growing velocity of Cu film is near 0.14-0.16 nm/s.
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Na Li, Xiaochang Ni, and Ching-yue Wang "The spatial detection on distribution of metal nano-particles during femtosecond laser ablation", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 738109 (24 August 2009); https://doi.org/10.1117/12.835964
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KEYWORDS
Laser ablation

Femtosecond phenomena

Copper

Metals

Plasma

Silicon films

Laser damage threshold

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