Paper
24 August 2009 Microreplication of flexible and stretchable polymer grating sensing elements for microstructural monitoring
Yueming Liu, Shaojun Zhang, Weijian Tian
Author Affiliations +
Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73812J (2009) https://doi.org/10.1117/12.835510
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China
Abstract
In the application of micro-structural monitoring, one kind of flexible and stretchable sensing elements was urgently demanded to detect the micro-bending and surface distortions, such as micro-bend sensing elements of medical catheter or smart skin sensing unit of micro-robots. Here the sensing element must be stretchable and flexible for free operation, and must be safe enough when used in bio-medical situation. Although the optical fiber grating is very mature and can be used as sensing element in micro-bending situation, it isn't stretchable enough and flexible enough when used in bio-medical science and micro- structural monitoring, and when applied in human body, the fiber grating isn't safe enough for its easily broken character. In this paper a kind of novel flexible and stretchable polymer grating sensing elements was fabricated by micro-replication process which could be used in micro- structural monitoring, and detailed processes was presented and discussed.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yueming Liu, Shaojun Zhang, and Weijian Tian "Microreplication of flexible and stretchable polymer grating sensing elements for microstructural monitoring", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73812J (24 August 2009); https://doi.org/10.1117/12.835510
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KEYWORDS
Silicon

Etching

Waveguides

Polymers

Scanning electron microscopy

Optical components

Polymethylmethacrylate

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