Microscopic TV sherography for microsystems characterization

U. Paul Kumar; N. Krishna Mohan; M. P. Kothiyal

doi:10.1117/12.825766

10 September 2009 Microscopic TV sherography for microsystems characterization

U. Paul Kumar, N. Krishna Mohan, M. P. Kothiyal

Proceedings Volume 7432, Optical Inspection and Metrology for Non-Optics Industries; 74320T (2009) https://doi.org/10.1117/12.825766
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

Microscopic TV holography (MTVH) is widely used for out-of-plane deformation and 3-D surface profile characterization of microsystems. However, the problem of overcrowding of fringes shows up when deformations are large, making quantitative fringe analysis difficult. In this paper, we introduce the use of microscopic TV sherography (MTVS) for microsystems characterization so that under relatively large out-of-plane deformation the slope of deformation is measured, rather than the deformation itself. The optical arrangement consists of a zoom imaging system with a conventional Michelson shear interferometer. We use the digital speckle photography (DSP) technique for precise measurement of magnitude of the lateral shear introduced between the two sheared images.

Citation Download Citation

U. Paul Kumar, N. Krishna Mohan, and M. P. Kothiyal "Microscopic TV sherography for microsystems characterization", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320T (10 September 2009); https://doi.org/10.1117/12.825766

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