Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments

Samuel K. Barber; Paul Soldate; Erik H. Anderson; Rossana Cambie; Stefano Marchesini; Wayne R. McKinney; Peter Z. Takacs; Dmitriy L. Voronov; Valeriy V. Yashchuk

doi:10.1117/12.825389

4 September 2009 Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments

Samuel K. Barber, Paul Soldate, Erik H. Anderson, Rossana Cambie, Stefano Marchesini, Wayne R. McKinney, Peter Z. Takacs, Dmitriy L. Voronov, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 7448, Advances in X-Ray/EUV Optics and Components IV; 744803 (2009) https://doi.org/10.1117/12.825389
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

The major problem of measurement of a power spectral density (PSD) distribution of the surface heights with surface profilometers arises due to the unknown Modulation Transfer Function (MTF) of the instruments. The MTF tends to distort the PSD at higher spatial frequencies. It has been suggested [Proc. SPIE 7077-7, (2007), Opt. Eng. 47 (7), 073602-1-5 (2008)] that the instrumental MTF of a surface profiler can be precisely measured using standard test surfaces based on binary pseudo-random (BPR) patterns. In the cited work, a one dimensional (1D) realization of the suggested method based on use of BPR gratings has been demonstrated. Here, we present recent achievements made in fabricating and using two-dimensional (2D) BPR arrays that allow for a direct 2D calibration of the instrumental MTF. The 2D BPRAs were used as standard test surfaces for 2D MTF calibration of the Micromap^TM-570 interferometric microscope with all available objectives. The effects of fabrication imperfections on the efficiency of calibration are also discussed.

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Samuel K. Barber, Paul Soldate, Erik H. Anderson, Rossana Cambie, Stefano Marchesini, Wayne R. McKinney, Peter Z. Takacs, Dmitriy L. Voronov, and Valeriy V. Yashchuk "Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments", Proc. SPIE 7448, Advances in X-Ray/EUV Optics and Components IV, 744803 (4 September 2009); https://doi.org/10.1117/12.825389

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