Tabletop soft x-ray lithography

M. C. Marconi; P. W. Wachulak; L. Urbanski; Artak Isoyan; Fan Jiang; Yang Chun Cheng; J. J. Rocca; C. S. Menoni; F. Cerrina

doi:10.1117/12.825509

28 September 2009 Tabletop soft x-ray lithography

M. C. Marconi, P. W. Wachulak, L. Urbanski, Artak Isoyan, Fan Jiang, Yang Chun Cheng, J. J. Rocca, C. S. Menoni, F. Cerrina

Author Affiliations +

Proceedings Volume 7451, Soft X-Ray Lasers and Applications VIII; 74510J (2009) https://doi.org/10.1117/12.825509
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

A compact capillary discharge table top soft X ray laser was used for a table top photolithography tool using different approaches: holographic printing, interferometric lithography and coherent Talbot self imaging. Large areas, of the order of millimeter square, with periodic and arbitrary patterns were printed in a photoresist in short exposure times. The proof of principle of the lithographic technique achieved the expected ~100 nm resolution.

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M. C. Marconi, P. W. Wachulak, L. Urbanski, Artak Isoyan, Fan Jiang, Yang Chun Cheng, J. J. Rocca, C. S. Menoni, and F. Cerrina "Tabletop soft x-ray lithography", Proc. SPIE 7451, Soft X-Ray Lasers and Applications VIII, 74510J (28 September 2009); https://doi.org/10.1117/12.825509

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