The self-reacting machining process of optical accessories and the precision testing

Zhao Wang; Zhong-hui Hu; Wei Zhang

doi:10.1117/12.836114

20 November 2009 The self-reacting machining process of optical accessories and the precision testing

Zhao Wang, Zhong-hui Hu, Wei Zhang

Proceedings Volume 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 75110W (2009) https://doi.org/10.1117/12.836114
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

Along with modern science and technology development, Optical precise instrument, especially in space applied optical precise instrument, all set the very high request in the surface quality and the processing precision aspect, and have already achieved a nanometer precision to the surface roughness Ra request. Therefore this paper puts forward to use self-reacting machining method, process for floating polish, as well as measure and analyze the shape, appearance, roughness of work-piece surface. Through comparing proof with the work-piece surface condition that the grinding processing method of tradition gets: in from meet processing condition take off , the plasticity region processing that can be stabilized and realize brittleness optical material gets very good processing surface quality. Under the experiment condition of this paper, can get Ra 2-3nm processes mirror surface in shorter time.

Citation Download Citation

Zhao Wang, Zhong-hui Hu, and Wei Zhang "The self-reacting machining process of optical accessories and the precision testing", Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 75110W (20 November 2009); https://doi.org/10.1117/12.836114

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